The engineering of subwavelength grating metamaterials has become an essential design strategy in silicon photonics.
The lithographic segmentation of integrated waveguides at the subwavelength scale enables the synthesis of on-chip
metamaterials and provides control over optical properties such as mode delocalization, wavelength dispersion, and
anisotropy. At the near-infrared wavelengths of the 1.55-μm telecom band, a range of subwavelength-based devices with
unprecedented performance has been demonstrated, including couplers, filters, and polarization-handling structures. In
this invited paper, we review the foundations of anisotropic subwavelength grating metamaterials and discuss our latest
advances in five new subwavelength-enhanced devices: a millimeter-long optical antenna that is evanescently coupled to
diffractive lateral segments, thereby achieving a record far-field beam width of 0.1º in silicon; a multi-line integrated
Bragg filter also using lateral loading segments, which produces 20 non-uniformly spaced spectral notches with a 3-dB
linewidth as low as 210 pm; a low-loss curved wavelength demultiplexer; a segmented multi-mode interference coupler
based on novel bricked subwavelength gratings, yielding a 1-dB bandwidth exceeding 140 nm; and a suspended
waveguide platform with low propagation loss at mid-infrared wavelengths.